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 Applications in the semiconductor industry require a lateral resolution in the micrometer range and high-resolution in the sub-micrometer range. Our sensors measure e.g. layer gauge of wafers, determine semiconductor structures in screen manufacturing, check bonding, measure transparent coatings, determine paint thickness and monitor mechanical and chemical removal process in real time for quality control. CHRocodile sensors are even used in ultra-high vacuum.

Product recommendation
Product family CHRocodile IT
CHRocodile IT
  • larger layer gauge measuring area
  • polished and rough surfaces
  • inline and offline
CHRocodile DW
CHRocodile DW
  • wafer, undoped / high-doped
  • inline and offline 
  • measuring on one side
  • high lateral resolution
CHRocodile LR
CHRocodile LR
  • distance and layer gauge
  • especially high lateral resolution
  • measuring on all surfaces
  • inline and offline
  • simple integration
  • damage-free measurement
  • solid
  • automatic light control
  • pilot laser
CHRocodile MI5
CHRocodile MI5
  • larger layer gauge measuring area
  • polished and rough surfaces
  • inline and offline
CHRocodile IT TW
CHRocodile IT TW
  • thin wafer
  • transparent and opaque plastic films
  • measurements from one side
  • inline and offline
  • high lateral resolution
  • maintenance-free & robust
  • simple to integrate
  • nondestructive measurement
  • wide measuring distance tolerance range
CHRocodile CLS
CHRocodile CLS
  • high speed
  • instantaneous profile measurement
  • interchangeable optical probes
  • inline inspection
  • distance and thickness
  • maintenance free and robust
  • easy to integrate
  • nondestructive measurement
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