Contactless Measurement of Distances and Layer Thicknesses

The high measurement precision and sturdy construction of the measuring head and the independence of the measurement from the condition of the object surface allow the CHR 150 N to be used both in the laboratory and in the factory.

Properties

• A scanning rate of 1 kHz at a resolution 10 nm over a measuring range of 300 µm
• The angle of the measuring head can be adjusted over a wide range for normal and reflective surfaces (90° ± 30° )
• White-light measurement (measurement results not falsified by speckled images)
• The confocal measurement principle eliminates fading at the edges
• Typical applications:
  - measurement of surfaces and transparent layers
  - topographical measurements of microstructures
• Easily integrated into automated measuring systems to meet individual customer requirements.

For further information:

• Data sheet (Optical Probes and Sensors)

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