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CHRocodile MI5

CHRocodile MI5

The modular CHRocodile MI5 optical sensor works with infrared light and is perfectly suitable for easy gauge measuring of visually non-transparent materials on one side as well. It is designed specifically for industrial inline application with up to 5 channels in a 19″ insertion. The various versions guarantees the optimum matching solution for numerous applications. Wafers in all stages of production can be measured precisely offline and inline within a gauge range of 10 µm - 1000 µm. 

  • larger layer gauge measuring area
  • polished and rough surfaces
  • visual transparent and non-transparent materials
  • measuring on one side
  • inline and offline
  • high lateral resolution
  • distance measurement (optional)
  • simple integration
  • damage-free measurement
  • solid
  • automatic light control
  • large measuring distance range of tolerance
  • measurements/seconds: 4000 
  • interferometric measuring range:
  •  CHRocodile IT 500: 37 µm - 4700 µm; CHRocodile IT 1000: 64 µm - 8200 µm; 
     CHRocodile IT 500 RW: 45 µm - 5600 µm; CHRocodile IT 1000 RW: 57 µm – 7300 µm
  • resolution: 10-7 x max. measuring range (23 bit)
  • reproducibility: 10-4 x max. measuring range
  • synchronization with external devices: trigger input, synchronization output, 3 encoder input
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Your contact
Mr. Scott Riedinger (Sales)
Phone: (248) 446-8100

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